VACUUM USE OF PERFLUORO POLYETHER

被引：22

作者：

LAURENSON, L

DENNIS, NTM

NEWTON, J

机构：

[1] Edwards High Vacuum, Research and Development, Crawley, Sussex, Manor Royal

来源：

VACUUM | 1979年 / 29卷 / 11-1期

关键词：

D O I：

10.1016/S0042-207X(79)80892-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

It is shown that the power input of a diffusion pump charged with perfluoro polyether (PFPE) can be greatly reduced without unduly affecting the performance and by careful choice of power and fluid charge vibrations from the boiling fluid can be kept to a minimum. Various grades of PFPE have been assessed as rotary pump fluids and a grade (Y VAC 06/6) identified as a suitable substitute for mineral oil in rotary pumps. Its chemical stability and the resultant advantages and limitations are discussed. It is physiologically inert but under high temperatures, like all fluorocarbons, breaks down to toxic gases. © 1979 Pergamon Press Ltd.

引用

页码：433 / 437

页数：5

共 6 条

[1] USE OF PERFLUOROALKYL POLYETHER FLUIDS IN VACUUM PUMPS [J].