PROCESS-CONTROL OF THE CHLOROBENZENE SINGLE-STEP LIFTOFF PROCESS WITH A DIAZO-TYPE RESIST

被引：19

作者：

COLLINS, GG ^{[1
]}

HALSTED, CW ^{[1
]}

机构：

[1] IBM CORP,BURLINGTON FACIL,DIV GEN TECHNOL,ESSEX JUNCTION,VT 05452

来源：

关键词：

D O I：

10.1147/rd.265.0596

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：596 / 604

页数：9

共 6 条

[1] APGAR Z, 1980, P AUTOFACT W, V2, P615
[2] Canavello B. J., 1977, IBM Technical Disclosure Bulletin, V19
[3] CANAVELLO BJ, 1980, IBM J RES DEV, V24, P452
[4] THE MECHANISM OF SINGLE-STEP LIFTOFF WITH CHLOROBENZENE IN A DIAZO-TYPE RESIST
HALVERSON, RM
MACINTYRE, MW
MOTSIFF, WT
[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1982, 26 (05) : 590 - 595
[5] A SILICON AND ALUMINUM DYNAMIC MEMORY TECHNOLOGY
LARSEN, RA
[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (03) : 268 - 282
[6] 1980, Patent No. 4212935