THE MECHANISM OF SINGLE-STEP LIFTOFF WITH CHLOROBENZENE IN A DIAZO-TYPE RESIST

被引：23

作者：

HALVERSON, RM

MACINTYRE, MW

MOTSIFF, WT

机构：

来源：

关键词：

D O I：

10.1147/rd.265.0590

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：590 / 595

页数：6

共 12 条

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