SCANNING FORCE MICROSCOPE AS A TOOL FOR STUDYING OPTICAL-SURFACES

被引：39

作者：

BENNETT, JM

JAHANMIR, J

PODLESNY, JC

BALTER, TL

HOBBS, DT

机构：

[1] WYKO CORP,TUCSON,AZ 85706

[2] PK SCI INSTRUMENTS,SUNNYVALE,CA 94089

来源：

APPLIED OPTICS | 1995年 / 34卷 / 01期

关键词：

SCANNING FORCE MICROSCOPE; SURFACE PROFILES; OPTICAL SURFACES; THIN FILMS; PRECISION GROUND GLASS;

D O I：

10.1364/AO.34.000213

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The scanning force microscope (SFM) is used to study the characteristics of optical surfaces, such as polished and precision-machined surfaces and thin-film structures. Previously unreported images of raised surface scratches and clumpiness on the surface of extremely smooth dielectric films are presented. The characteristics of SFM's that are important in studying optical surfaces are discussed. They include the effects of tip geometry, surface charging, particulate contamination, scanner artifacts, and instrument calibration.

引用

页码：213 / 230

页数：18

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