RF PERFORMANCE OF SIC MESFETS ON HIGH-RESISTIVITY SUBSTRATES

被引:53
作者
SRIRAM, S
CLARKE, RC
BURK, AA
HOBGOOD, HM
MCMULLIN, PG
ORPHANOS, PA
SIERGIEJ, RR
SMITH, TJ
BRANDT, CD
DRIVER, MC
HOPKINS, RH
机构
[1] Westinghouse Science and Technology Center, Pitts-burgh
关键词
MESFET devices;
D O I
10.1109/55.334666
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
State-of-the art SiC MESFET's showing a record high f(max) of 26 GHz and RF gain of 8.5 dB at 10 GHz are described in this paper. These results were obtained by using high-resistivity SiC substrates for the first time to minimize substrate parasitics. The fabrication and characterization of these devices are discussed.
引用
收藏
页码:458 / 459
页数:2
相关论文
共 2 条
[1]   LARGE-DIAMETER 6H-SIC FOR MICROWAVE DEVICE APPLICATIONS [J].
HOBGOOD, HM ;
BARRETT, DL ;
MCHUGH, JP ;
CLARKE, RC ;
SRIRAM, S ;
BURK, AA ;
GREGGI, J ;
BRANDT, CD ;
HOPKINS, RH ;
CHOYKE, WJ .
JOURNAL OF CRYSTAL GROWTH, 1994, 137 (1-2) :181-186
[2]  
SRIRAM S, 1994, I PHYSICS C SERIES, V137, P491