PLASMA-DEPOSITED METAL-CONTAINING POLYMER-FILMS

被引：23

作者：

SUHR, H

ETSPULER, A

FEURER, E

OEHR, C

机构：

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1988年 / 8卷 / 01期

关键词：

D O I：

10.1007/BF01016927

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：9 / 17

页数：9

共 26 条

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