PREPARATION OF GOLD-FILMS BY PLASMA-CVD

被引:33
作者
FEURER, E
SUHR, H
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1987年 / 44卷 / 02期
关键词
D O I
10.1007/BF00626420
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:171 / 175
页数:5
相关论文
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