共 11 条
- [2] ALLEN SD, 1984, P SOC PHOTO-OPT INST, V459, P42, DOI 10.1117/12.939433
- [4] BERRY RS, 1980, PHYSICAL CHEM, P1073
- [5] The organic compounds of gold Part VII Methyl and ethyl compounds [J]. JOURNAL OF THE CHEMICAL SOCIETY, 1939, : 762 - 767
- [6] EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718
- [7] LASER CHEMICAL VAPOR-DEPOSITION OF COPPER [J]. APPLIED PHYSICS LETTERS, 1985, 46 (02) : 204 - 206
- [8] KLASSEN RA, UNPUB
- [9] Maissel L.I., 1970, HDB THIN FILM TECHNO, P13
- [10] LCVD OF COPPER - DEPOSITION RATES AND DEPOSIT SHAPES [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 40 (01): : 1 - 5