INFRARED-LASER INDUCED REACTION OF SF6 WITH SILICON SURFACES

[1] AMBARTZUMIAN RV, 1976, SOV PHYS JETP, V44, P231

[2] AMBARTZUMIAN RV, 1977, CHEM BIOCH APPLICATI, V3, P167

[3] ION-SURFACE INTERACTIONS IN PLASMA ETCHING [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3532 - 3540

[4] MULTI-PHOTON DISSOCIATION OF POLYATOMIC-MOLECULES [J]. ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 1979, 30 : 379 - 409

[5] SCHULZ PA, J CHEM PHYS

[6] WAGNER JJ, 1979, 4TH P INT S PLASM CH, V1, P120

[1] AMBARTZUMIAN RV, 1976, SOV PHYS JETP, V44, P231

[2] AMBARTZUMIAN RV, 1977, CHEM BIOCH APPLICATI, V3, P167

[3] ION-SURFACE INTERACTIONS IN PLASMA ETCHING [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3532 - 3540

[4] MULTI-PHOTON DISSOCIATION OF POLYATOMIC-MOLECULES [J]. ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 1979, 30 : 379 - 409

[5] SCHULZ PA, J CHEM PHYS

[6] WAGNER JJ, 1979, 4TH P INT S PLASM CH, V1, P120