ON THE MECHANISM OF ENERGY-DISTRIBUTION IN LIQUID-METAL ION SOURCES

被引：13

作者：

KOMURO, M

ARIMOTO, H

KATO, T

机构：

[1] FUJITSU LABS LTD,ATSUGI 24303,JAPAN

[2] ANELVA CO,FUCHU,TOKYO 183,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.584324

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：923 / 926

页数：4

共 13 条

[1]

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[3] MECHANISM OF LIQUID-METAL ELECTRON AND ION SOURCES [J].

GOMER, R .

APPLIED PHYSICS, 1979, 19 (04) :365-375

[4] SHAPE OF A LIQUID-METAL ION-SOURCE - A DYNAMIC-MODEL INCLUDING FLUID-FLOW AND SPACE-CHARGE EFFECTS [J].

KINGHAM, DR ;

SWANSON, LW .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :123-132

[5] ION-BEAM EXPOSURE APPARATUS USING A LIQUID-METAL SOURCE [J].

KOMURO, M .

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[6]

Komuro M., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P337

[7]

KOMURO M, IN PRESS J PHYS PARI

[8]

Muller E W, 1969, FIELD ION MICROSCOPY

[9] FIELD CALIBRATION USING ENERGY-DISTRIBUTION OF FIELD IONIZATION [J].

SAKURAI, T ;

MULLER, EW .

PHYSICAL REVIEW LETTERS, 1973, 30 (12) :532-535

[10] HIGH-INTENSITY SCANNING ION PROBE WITH SUBMICROMETER SPOT SIZE [J].

SELIGER, RL ;

WARD, JW ;

WANG, V ;

KUBENA, RL .

APPLIED PHYSICS LETTERS, 1979, 34 (05) :310-312

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