POLYCRYSTALLINE HEXAGONAL BORON-NITRIDE FILMS ON SIO2 FOR III-V SEMICONDUCTOR APPLICATIONS

被引：8

作者：

HURD, JL

PERRY, DL

LEE, BT

YU, KM

BOURRET, ED

HALLER, EE

机构：

来源：

JOURNAL OF MATERIALS RESEARCH | 1989年 / 4卷 / 02期

关键词：

D O I：

10.1557/JMR.1989.0350

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：350 / 354

页数：5

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