OPTICAL, ELECTRICAL AND STRUCTURAL-PROPERTIES OF PLASMA-DEPOSITED AMORPHOUS-SILICON

被引：36

作者：

TANAKA, K

NAKAGAWA, K

MATSUDA, A

MATSUMURA, M

YAMAMOTO, H

YAMASAKI, S

OKUSHI, H

IIZIMA, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 01期

关键词：

D O I：

10.7567/JJAPS.20S1.267

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：267 / 273

页数：7

共 17 条

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[8] AMORPHOUS-SILICON IMAGE PICKUP DEVICES [J].

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