OPTICAL, ELECTRICAL AND STRUCTURAL-PROPERTIES OF PLASMA-DEPOSITED AMORPHOUS-SILICON

被引:36
作者
TANAKA, K
NAKAGAWA, K
MATSUDA, A
MATSUMURA, M
YAMAMOTO, H
YAMASAKI, S
OKUSHI, H
IIZIMA, S
机构
关键词
D O I
10.7567/JJAPS.20S1.267
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:267 / 273
页数:7
相关论文
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