ATOMIC-RESOLUTION ELECTRON-MICROSCOPE IMAGES FORMED BY SIL(3)-IONIZATION ELECTRONS

被引:6
作者
ENDOH, H [1 ]
HASHIMOTO, H [1 ]
机构
[1] OKAYAMA UNIV SCI,DEPT MECH ENGN,OKAYAMA 700,JAPAN
关键词
D O I
10.1016/0304-3991(94)90135-X
中图分类号
TH742 [显微镜];
学科分类号
摘要
Contrast of energy-filtered electron microscope images with atomic resolution of Si atoms producing SiL(3)-ionization electrons in a Si crystal is discussed. The localization width of the inelastic scattering potential is deduced from the inelastic scattering factor for SiL(3)-ionization, which is based on a program for a modified hydrogenic L-shell cross section. The image contrast at the bottom surfaces of the Si crystals containing a single inelastic scattering layer at the top, middle and bottom layers showed diffuse, sharp and very sharp image contrast, i.e. top-bottom effect is predominant. Similar images of an atom which scattered electrons inelastically with a very small energy loss in an aluminum crystal were calculated and it is noted that the atomic structure of aluminum is observed.
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页码:351 / 356
页数:6
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