HIGH-RESOLUTION IMAGING BY FOURIER-TRANSFORM X-RAY HOLOGRAPHY

被引:230
作者
MCNULTY, I
KIRZ, J
JACOBSEN, C
ANDERSON, EH
HOWELLS, MR
KERN, DP
机构
[1] SUNY STONY BROOK,DEPT PHYS,STONY BROOK,NY 11794
[2] UNIV CALIF BERKELEY,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
[3] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1126/science.256.5059.1009
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Fourier transform x-ray holography has been used to image gold test objects with submicrometer structure, resolving features as small as 60 nanometers. The hologram-recording instrument uses coherent 3.4-nanometer radiation from the soft x-ray undulator beamline X1A at the National Synchrotron Light Source. The specimen to be imaged is placed near the first-order focal spot produced by a Fresnel zone plate; the other orders, chiefly the zeroth, illuminate the specimen. The wave scattered by the specimen interferes with the spherical reference wave from the focal spot, forming a hologram with fringes of low spatial frequency. The hologram is recorded in digital form by a charge-coupled device camera, and the specimen image is obtained by numerical reconstruction.
引用
收藏
页码:1009 / 1012
页数:4
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