COMPUTER-SIMULATION OF HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY IMAGES OF SI/SIO2 INTERFACES

被引：21

作者：

OHDOMAN, I

MIHARA, T

KAI, K

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 08期

关键词：

D O I：

10.1063/1.336959

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2798 / 2802

页数：5

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