MONOLITHIC INTEGRATION OF GAAS MSM PHOTODETECTOR AND SIO2/SI3N4 DIELECTRIC OPTICAL WAVE-GUIDE

被引：4

作者：

ABOUDOU, A

GOUTAIN, E

VILCOT, JP

FRANCOIS, M

JOANNES, L

DECOSTER, D

机构：

[1] Centre hyperfrequences et Semiconducteurs, URA CNRS 287, Universite des Sciences et Techniques de Lille-Flandres-Artois

来源：

ELECTRONICS LETTERS | 1992年 / 28卷 / 01期

关键词：

DIELECTRIC DEVICES; OPTICAL WAVE-GUIDES; INTEGRATED CIRCUITS; PHOTODETECTORS; INTEGRATED OPTICS;

D O I：

10.1049/el:19920032

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A photonic integrated circuit is presented that comprises a GaAs metal-semiconductor-metal and an SiO2/Si3N4 dielectric optical waveguide made on a GaAs substrate. A grating is used for light injection and coupling with the detector is achieved using the evanescent field coupling technique.

引用

页码：52 / 53

页数：2

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