STUDY OF PHOSPHORUS ADSORPTION AND DESORPTION KINETICS ON SILICON (111) SURFACES

[1] ARTHUR JR, 1969, STRUCTURE CHEMISTRY, P46

[2] KINETIC AND EXPERIMENTAL BASIS OF FLASH DESORPTION [J]. JOURNAL OF APPLIED PHYSICS, 1961, 32 (01) : 4 - &

[3] CHLORINE REACTIONS ON SI (111) SURFACE [J]. SURFACE SCIENCE, 1969, 18 (02) : 398 - &

[4] (111) SURFACE OF TYPE SILICON [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (02): : 911 - +

[5] QUANTITATIVE STUDY OF AUGER-ELECTRON SIGNALS OF PHOSPHORUS ON SILICON USING A QUARTZ CRYSTAL MICROBALANCE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (02): : 608 - &

[6] Redhead P. A., 1962, VACUUM, V12, P203, DOI DOI 10.1016/0042-207X(62)90978-8

[7] DETERMINATION OF SURFACE STRUCTURES USING LEED AND ENERGY ANALYSIS OF SCATTERED ELECTRONS [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (01) : 314 - &

[8] WEBER RE, PRIVATE COMMUNICATIO

[1] ARTHUR JR, 1969, STRUCTURE CHEMISTRY, P46

[2] KINETIC AND EXPERIMENTAL BASIS OF FLASH DESORPTION [J]. JOURNAL OF APPLIED PHYSICS, 1961, 32 (01) : 4 - &

[3] CHLORINE REACTIONS ON SI (111) SURFACE [J]. SURFACE SCIENCE, 1969, 18 (02) : 398 - &

[4] (111) SURFACE OF TYPE SILICON [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (02): : 911 - +

[5] QUANTITATIVE STUDY OF AUGER-ELECTRON SIGNALS OF PHOSPHORUS ON SILICON USING A QUARTZ CRYSTAL MICROBALANCE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (02): : 608 - &

[6] Redhead P. A., 1962, VACUUM, V12, P203, DOI DOI 10.1016/0042-207X(62)90978-8

[7] DETERMINATION OF SURFACE STRUCTURES USING LEED AND ENERGY ANALYSIS OF SCATTERED ELECTRONS [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (01) : 314 - &

[8] WEBER RE, PRIVATE COMMUNICATIO