QUANTITATIVE STUDY OF AUGER-ELECTRON SIGNALS OF PHOSPHORUS ON SILICON USING A QUARTZ CRYSTAL MICROBALANCE

被引：23

作者：

LEVENSON, LL

BRYSON, CE

DAVIS, LE

MELLES, JJ

KOU, WH

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 02期

关键词：

D O I：

10.1116/1.1317731

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：608 / &

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