CHEMICAL VAPOR-DEPOSITION OF MOLYBDENUM ON GRAPHITE

[1] STRUCTURE-PROPERTY-PROCESS RELATIONSHIPS IN CHEMICAL VAPOR-DEPOSITION CVD [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 680 - 686

[2] CARVER GE, 1979, THIN SOLID FILMS, V63, P169, DOI 10.1016/0040-6090(79)90121-4

[3] FRIES RJ, 1968, IST252 AEC US REP, P89

[4] LANDER JJ, 1947, AIME2259 TECH PUBL

[5] CHEMICAL VAPOR-DEPOSITION OF NIOBIUM ON GRAPHITE [J]. THIN SOLID FILMS, 1979, 63 (02) : 303 - 308

[6] Movchan B. A., 1969, Fizika Metallov i Metallovedenie, V28, P653

[7] POWELL CF, 1966, VAPOR DEPOSITION, P303

[8] SMITHELLS CJ, 1967, METALS REFERENCE BOO, P917

[9] INFLUENCE OF APPARATUS GEOMETRY AND DEPOSITION CONDITIONS ON STRUCTURE AND TOPOGRAPHY OF THICK SPUTTERED COATINGS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 666 - 670

[1] STRUCTURE-PROPERTY-PROCESS RELATIONSHIPS IN CHEMICAL VAPOR-DEPOSITION CVD [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 680 - 686

[2] CARVER GE, 1979, THIN SOLID FILMS, V63, P169, DOI 10.1016/0040-6090(79)90121-4

[3] FRIES RJ, 1968, IST252 AEC US REP, P89

[4] LANDER JJ, 1947, AIME2259 TECH PUBL

[5] CHEMICAL VAPOR-DEPOSITION OF NIOBIUM ON GRAPHITE [J]. THIN SOLID FILMS, 1979, 63 (02) : 303 - 308

[6] Movchan B. A., 1969, Fizika Metallov i Metallovedenie, V28, P653

[7] POWELL CF, 1966, VAPOR DEPOSITION, P303

[8] SMITHELLS CJ, 1967, METALS REFERENCE BOO, P917

[9] INFLUENCE OF APPARATUS GEOMETRY AND DEPOSITION CONDITIONS ON STRUCTURE AND TOPOGRAPHY OF THICK SPUTTERED COATINGS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 666 - 670