PROBE CHARACTERIZATION FOR SCANNING PROBE METROLOGY

被引：24

作者：

GRIGG, DA ^{[1
]}

RUSSELL, PE ^{[1
]}

GRIFFITH, JE ^{[1
]}

VASILE, MJ ^{[1
]}

FITZGERALD, EA ^{[1
]}

机构：

[1] AT&T BELL LABS, MURRAY HILL, NJ 07974 USA

来源：

ULTRAMICROSCOPY | 1992年 / 42卷

关键词：

D O I：

10.1016/0304-3991(92)90494-5

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Precision probe metrology requires that the probe be carefully formed and measured. We demonstrate a method to accurately measure the shape of a probe in situ by scanning special measurement structures.

引用

页码：1616 / 1620

页数：5

共 10 条

[1] CHARACTERIZATION OF SCANNING PROBE MICROSCOPE TIPS FOR LINEWIDTH MEASUREMENT
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3586 - 3589
[2] GRIFFITH JE, 1991, ULSI SCI TECHNOLOGY
[3] RECONSTRUCTION OF STM AND AFM IMAGES DISTORTED BY FINITE-SIZE TIPS
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[J]. SURFACE SCIENCE, 1991, 253 (1-3) : 353 - 364
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[6] SUBMICROMETER LINEWIDTH METROLOGY IN THE OPTICAL MICROSCOPE
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[J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS, 1987, 92 (03): : 187 - 204
[7] SUBMICROMETER MICROELECTRONICS DIMENSIONAL METROLOGY - SCANNING ELECTRON-MICROSCOPY
POSTEK, MT
JOY, DC
[J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS, 1987, 92 (03): : 205 - 228
[8] SCANNING TUNNELING MICROSCOPY ON ROUGH SURFACES - DECONVOLUTION OF CONSTANT CURRENT IMAGES
REISS, G
SCHNEIDER, F
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HOFFMANN, H
[J]. APPLIED PHYSICS LETTERS, 1990, 57 (09) : 867 - 869
[9] SCANNING PROBE TIPS FORMED BY FOCUSED ION-BEAMS
VASILE, MJ
GRIGG, DA
GRIFFITH, JE
FITZGERALD, EA
RUSSELL, PE
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1991, 62 (09) : 2167 - 2171
[10] SCANNING PROBE TIP GEOMETRY OPTIMIZED FOR METROLOGY BY FOCUSED ION-BEAM ION MILLING
VASILE, MJ
GRIGG, D
GRIFFITH, JE
FITZGERALD, E
RUSSELL, PE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3569 - 3572

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