SUBMICROMETER MICROELECTRONICS DIMENSIONAL METROLOGY - SCANNING ELECTRON-MICROSCOPY

[1] MATERIAL-SURFACES FOR ELECTRON-OPTICAL EQUIPMENT [J]. SCANNING, 1983, 5 (01) : 39 - 44

[2] BRUNNER M, 1986, SCAN ELECTRON MICROS, V1986, P377

[3] DRESCHER H, 1970, Z ANGEW PHYSIK, V29, P331

[4] Echlin P., 1975, Scanning Electron Microscopy 1975, P679

[5] DAMAGE TO RESIST STRUCTURES DURING SCANNING ELECTRON-MICROSCOPE INSPECTION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 409 - 413

[6] REDUCTION OF NOISE IN TV RATE ELECTRON-MICROSCOPE IMAGES BY DIGITAL FILTERING [J]. JOURNAL OF MICROSCOPY-OXFORD, 1982, 127 (JUL): : 29 - 37

[7] AN AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION SYSTEM FOR THE SEM AND CTEM [J]. JOURNAL OF MICROSCOPY-OXFORD, 1982, 127 (AUG): : 185 - 199

[8] Frosien J., 1985, Microcircuit Engineering 84. International Conference Proceedings, P441

[9] GOLDSTEIN JI, 1984, SCANNING ELECTRON MI

[10] HEMBREE GG, 1981, MICROBEAM ANAL, P123

[1] MATERIAL-SURFACES FOR ELECTRON-OPTICAL EQUIPMENT [J]. SCANNING, 1983, 5 (01) : 39 - 44

[2] BRUNNER M, 1986, SCAN ELECTRON MICROS, V1986, P377

[3] DRESCHER H, 1970, Z ANGEW PHYSIK, V29, P331

[4] Echlin P., 1975, Scanning Electron Microscopy 1975, P679

[5] DAMAGE TO RESIST STRUCTURES DURING SCANNING ELECTRON-MICROSCOPE INSPECTION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 409 - 413

[6] REDUCTION OF NOISE IN TV RATE ELECTRON-MICROSCOPE IMAGES BY DIGITAL FILTERING [J]. JOURNAL OF MICROSCOPY-OXFORD, 1982, 127 (JUL): : 29 - 37

[7] AN AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION SYSTEM FOR THE SEM AND CTEM [J]. JOURNAL OF MICROSCOPY-OXFORD, 1982, 127 (AUG): : 185 - 199

[8] Frosien J., 1985, Microcircuit Engineering 84. International Conference Proceedings, P441

[9] GOLDSTEIN JI, 1984, SCANNING ELECTRON MI

[10] HEMBREE GG, 1981, MICROBEAM ANAL, P123