AN AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION SYSTEM FOR THE SEM AND CTEM

被引：109

作者：

ERASMUS, SJ

SMITH, KCA

机构：

来源：

JOURNAL OF MICROSCOPY-OXFORD | 1982年 / 127卷 / AUG期

关键词：

D O I：

10.1111/j.1365-2818.1982.tb00412.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：185 / 199

页数：15

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