PREVENTION OF RESIST PATTERN COLLAPSE BY RESIST HEATING DURING RINSING

被引：21

作者：

TANAKA, T ^{[1
]}

MORIGAMI, M ^{[1
]}

OIZUMI, H ^{[1
]}

SOGA, T ^{[1
]}

OGAWA, T ^{[1
]}

MURAI, F ^{[1
]}

机构：

[1] SORTEC CORP,TSUKUBA,IBARAKI 30042,JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1994年 / 141卷 / 12期

关键词：

D O I：

10.1149/1.2059382

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

A novel resist hardening method is discussed for preventing resist pattern collapse (bending and breaking). In this method, a cross-link-type chemically amplified resist is heated during rinsing. This heating increases the cross-link ratio of the resist, thus hardening the resist pattern before drying. Using this method, the critical aspect ratio of 0.15 mu m line and space patterns is improved from 5 to 6.7.

引用

页码：L169 / L171

页数：3

共 12 条

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