OPTICAL-EMISSION SPECTROSCOPY FOR ANALYSIS OF BROAD ION-BEAMS

被引：9

作者：

HEINRICH, F

STOLL, HP

SCHEER, HC

HOFFMANN, P

机构：

来源：

VACUUM | 1989年 / 39卷 / 11-12期

关键词：

D O I：

10.1016/0042-207X(89)91117-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1181 / 1184

页数：4

共 17 条

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