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AMORPHOUS MOLYBDENUM OXYSULFIDE THIN-FILMS AND THEIR PHYSICAL CHARACTERIZATION

被引：20
作者：
SCHMIDT, E
SOURISSEAU, C
MEUNIER, G
LEVASSEUR, A
机构：
[1] UNIV BORDEAUX 1,ECOLE NATL SUPER CHIM & PHYS BORDEAUX,F-33405 TALENCE,FRANCE
[2] UNIV BORDEAUX 1,SPECT MOLEC & CRISTALLINE LAB,CNRS,UA 124,F-33405 TALENCE,FRANCE
来源：
THIN SOLID FILMS | 1995年 / 260卷 / 01期
关键词：
ELECTRICAL PROPERTIES AND MEASUREMENTS; INFRARED SPECTROSCOPY; OPTICAL PROPERTIES; SPUTTERING;
D O I：
10.1016/0040-6090(94)06463-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
New amorphous molybdenum oxysulfides have been obtained by r.f. sputtering and have been characterized. Their chemical composition depends on the partial pressure of oxygen introduced into the sputtering chamber during preparation. IR and extended X-ray absorption fine structure studies have confirmed previous results obtained by X-ray photoelectron spectroscopy. Depending on the composition, three kinds of molybdenum have been identified with different surroundings: one with only oxygen, one with only sulfur, and the last with oxygen and sulfur. The electrical conductivity also depends on the composition: best values have been obtained with a low oxygen content. Finally, the densities of these molybdenum oxysulfides are much lower than those of crystalline molybdenum oxides (MoO2, MoO3) or sulfide (MoS2). These materials are good candidates as positive electrode materials in microbatteries.
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页码：21 / 25
页数：5
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