CONFOCAL SCANNING DARK-FIELD POLARIZATION MICROSCOPY

被引：11

作者：

KIMURA, S ^{[1
]}

WILSON, T ^{[1
]}

机构：

[1] UNIV OXFORD, DEPT ENGN SCI, OXFORD OX1 3PJ, ENGLAND

来源：

APPLIED OPTICS | 1994年 / 33卷 / 07期

关键词：

Electromagnetic wave diffraction - Light polarization - Mathematical models - Optics - Scanning;

D O I：

10.1364/AO.33.001274

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Dark-field imaging is attained by use of a lambda/4 plate and an analyzer in a confocal scanning microscope. This dark-field microscope detects only the edge-diffracted wave whose polarization is different from that of the incident beam. The fact that images of photoresist patterns taken by the microscope show only the edges of the patterns confirms the dark-field nature of the imaging.

引用

页码：1274 / 1278

页数：5

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