REACTIVE SPUTTER-COATED REACTION-BONDED SILICON-NITRIDE

被引：5

作者：

GREGORY, OJ

RICHMAN, MH

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(82)90430-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：163 / 173

页数：11

共 11 条

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HU, SM ;

GREGOR, LV .

[7]

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[8]

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[9]

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