ANALYSIS OF REFLECTIVITY SPECTRA OF SILICON IMPLANTED WITH 70 KEV B, SI, AND AG IONS

被引：13

作者：

CZARNECKASUCH, E

KISIEL, A

机构：

来源：

关键词：

D O I：

10.1016/0039-6028(88)90333-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：221 / 234

页数：14

共 27 条

[1] COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS [J].

ALMEN, O ;

BRUCE, G .

NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02) :257-278

[2] SPUTTERING EXPERIMENTS IN THE HIGH ENERGY REGION [J].

ALMEN, O ;

BRUCE, G .

NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02) :279-289

[3]

[Anonymous], 1963, KGL DANSKE VIDENSKAB

[4]

Beckmann P., 1963, SCATTERING ELECTROMA

BENNETT, HE ;

PORTEUS, JO .

BIERSACK, JP .

ZEITSCHRIFT FUR PHYSIK A-HADRONS AND NUCLEI, 1982, 305 (02) :95-101

[7]

Brice D. K., 1970, Radiation Effects, V6, P77, DOI 10.1080/00337577008235048

[8]

BRICE DK, 1975, ION IMPLANTATION RAN

[9]

BRICE DK, 1972, RAD EFFECTS, V11, P227

[10] CLASSICAL THEORY OF OPTICAL DISPERSION [J].

CHRISTY, RW .