TECHNOLOGY AND APPLICATIONS OF PUMPING FLUIDS

被引：5

作者：

LAURENSON, L

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 04期

关键词：

D O I：

10.1116/1.571660

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：989 / 995

页数：7

共 25 条

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[3]

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CLEAVER, JS ;

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[7] VACUUM PUMPING OF AGGRESSIVE AND DUST LADEN VAPORS [J].

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[8]

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[9]

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[10]

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