HIGH-TEMPERATURE SUPERCONDUCTING FILMS BY RF MAGNETRON SPUTTERING

被引:20
作者
KADIN, AM [1 ]
BALLENTINE, PH [1 ]
ARGANA, J [1 ]
RATH, RC [1 ]
机构
[1] CVC PROD INC,ROCHESTER,NY 14603
关键词
D O I
10.1109/20.92799
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:2437 / 2440
页数:4
相关论文
共 22 条
[1]   LOW-TEMPERATURE PROCESS FOR THE PREPARATION OF HIGH-TC SUPERCONDUCTING THIN-FILMS [J].
ADACHI, H ;
HIROCHI, K ;
SETSUNE, K ;
KITABATAKE, M ;
WASA, K .
APPLIED PHYSICS LETTERS, 1987, 51 (26) :2263-2265
[2]  
ARGANA J, 1988, AIP C P, V165, P58
[3]  
BALLENTIN PH, 1989, IEEE MAGNET, V25
[4]  
BALLENTINE PH, 1988, MAT RES SOC P, V99, P335
[5]   REACTIVE MAGNETRON SPUTTERING OF THIN-FILM SUPERCONDUCTOR YBA2CU3O7-CHI [J].
CHAR, K ;
KENT, AD ;
KAPITULNIK, A ;
BEASLEY, MR ;
GEBALLE, TH .
APPLIED PHYSICS LETTERS, 1987, 51 (17) :1370-1372
[6]   CRITICAL-CURRENT MEASUREMENTS IN EPITAXIAL-FILMS OF YBA2CU3O7-X COMPOUND [J].
CHAUDHARI, P ;
KOCH, RH ;
LAIBOWITZ, RB ;
MCGUIRE, TR ;
GAMBINO, RJ .
PHYSICAL REVIEW LETTERS, 1987, 58 (25) :2684-2686
[7]  
EDIN JW, 1988, APPL PHYS LETT, V52, P331
[8]   LARGELY ANISOTROPIC SUPERCONDUCTING CRITICAL CURRENT IN EPITAXIALLY GROWN BA2YCU3O7-Y THIN-FILM [J].
ENOMOTO, Y ;
MURAKAMI, T ;
SUZUKI, M ;
MORIWAKI, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (07) :L1248-L1250
[9]  
HARPER JA, 1988, AIP C P, V165
[10]  
KADIN AM, 1988, IN PRESS APR P C SUP