MICROSTRUCTURAL CHARACTERIZATION FOR SPUTTER-DEPOSITED CUINSE2 FILMS AND PHOTOVOLTAIC DEVICES

被引:22
作者
NAKADA, T [1 ]
MIGITA, K [1 ]
NIKI, S [1 ]
KUNIOKA, A [1 ]
机构
[1] ELECTROTECH LAB,TSUKUBA,IBARAKI 305,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 9A期
关键词
CUINSE2; SPUTTERING; SOLAR CELLS; PHOTOLUMINESCENCE; LATTICE DEFECTS;
D O I
10.1143/JJAP.34.4715
中图分类号
O59 [应用物理学];
学科分类号
摘要
Comparative study on the microstructural and photoluminescence (PL) properties of CuInSe2 films deposited by both three-source sputtering and hybrid sputtering was carried out by high-resolution transmission electron microscopy (HRTEM), scanning electron microscopy (SEM), PL spectroscopy and X-ray diffraction analysis. The CuInSe2 films deposited by three-source sputtering exhibited small grain size and considerably high density of lattice defects, which led to poor cell performance. In contrast, hybrid-sputtered films showed relatively large grain size and low density of defects. Significant difference in PL spectra was also observed between CuInSe2 films deposited by both methods. ZnO:Al/CdS/CuInSe2 solar cell with an active-area efficiency of 11.3% was achieved using hybrid-sputtered material. The correlation between microstructural properties and device performance suggests that the decreasing defect density in CuInSe2 films is essential for achieving high efficiency solar cells by sputtering process.
引用
收藏
页码:4715 / 4721
页数:7
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