PROXIMITY EFFECT DEPENDENCE ON SUBSTRATE MATERIAL

被引：28

作者：

AIZAKI, N

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

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D O I：

10.1116/1.570282

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1726 / 1733

页数：8

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