2.45 GHZ microwave plasmas at magnetic fields below ECR

被引：12

作者：

Popov, Oleg A. ^{[1
]}

Shapoval, Sergei Y. ^{[1
]}

Yoder, Merle D., Jr. ^{[1
]}

机构：

[1] Microscience Inc, Norwell, MA 02061 USA

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 1992年 / 1卷 / 01期

关键词：

D O I：

10.1088/0963-0252/1/1/002

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Microwave plasmas (f = omega/2 pi = 2.45GHz, 200-1000 W) were excited and maintained at low static magnetic fields, B=300-450G and gas pressures of 0.2-10mTorr. Two modes were found and studied: low plasma density mode with N(e) < N(cr) = 7.4 x 10(10) cm(-3), and high (overdense, N(e) > N(cr)) plasma mode. The resonance transition from low- to high-mode plasma was observed when the magnetic field near the microwave introduction (vacuum) window was B(w) = 435-440G. It was attributed to the second gyratron harmonic resonance, omega = 2 omega(BS). Mechanisms of microwave power absorption at B < B(ce) = 875 G are discussed.

引用

页码：7 / 12

页数：6

共 18 条

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