SPUTTERING TARGET FOR PRODUCTION OF CONICR/CR SPUTTERED HARD DISK

被引：4

作者：

YAMADA, T

HIGUCHI, Y

TANI, N

ISHIKAWA, M

OTA, Y

NAKAMURA, K

ITOH, A

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574895

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1971 / 1974

页数：4

共 5 条

[1]

CHEN GL, 1986, IEEE T MAGN, V22, P334, DOI 10.1109/TMAG.1986.1064410

[2] THIN-FILMS FOR MAGNETIC RECORDING TECHNOLOGY - A REVIEW [J].

HOWARD, JK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (01) :1-13

[3] FILM STRUCTURE AND MAGNETIC-PROPERTIES OF CONICR/CR SPUTTERED THIN-FILM [J].

ISHIKAWA, M ;

TANI, N ;

YAMADA, T ;

OTA, Y ;

NAKAMURA, K ;

ITOH, A .

IEEE TRANSACTIONS ON MAGNETICS, 1986, 22 (05) :573-575

[4] ANISOTROPY INDUCED SIGNAL WAVE-FORM MODULATION OF DC MAGNETRON SPUTTERED THIN-FILM DISKS [J].

TENG, E ;

BALLARD, N .

IEEE TRANSACTIONS ON MAGNETICS, 1986, 22 (05) :579-581

[5] CONICR/CR SPUTTERED THIN-FILM DISKS [J].

YAMADA, T ;

TANI, N ;

ISHIKAWA, M ;

OTA, Y ;

NAKAMURA, K ;

ITOH, A .

IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) :1429-1431

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