INTERNAL-STRESS AND THERMAL-EXPANSION COEFFICIENT OF GDA-SI FILMS

被引：17

作者：

MIYAGI, M

FUNAKOSHI, N

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 01期

关键词：

D O I：

10.1143/JJAP.20.289

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：289 / 290

页数：2

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