APPLICATION OF A THERMAL FIELD-EMISSION SOURCE FOR HIGH-RESOLUTION, HIGH-CURRENT E-BEAM MICROPROBES

被引：37

作者：

TUGGLE, D

SWANSON, LW

ORLOFF, J

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570275

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1699 / 1703

页数：5

共 10 条

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[8] FIELD ELECTRON CATHODE STABILITY STUDIES - ZIRCONIUM-TUNGSTEN THERMAL-FIELD CATHODE [J].

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[9] ANGULAR CONFINEMENT OF FIELD ELECTRON AND ION EMISSION [J].

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[10] ELECTRON-GUN FOR DATA STORAGE MICROMACHINING [J].

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