USING PROTON BACKSCATTERING METHOD OF LIGHT-ELEMENT PROFILING TO ACHIEVE TAILORED LOW-Z IMPURITY DISTRIBUTIONS IN SOLIDS

被引：5

作者：

BLEWER, RS

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1978年 / 149卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(78)90836-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：47 / 52

页数：6

相关论文

共 18 条

[1] MIGRATION AND COALESCENCE OF INERT GAS BUBBLES IN METALS
BARNES, RS
MAZEY, DJ
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1963, 275 (1360) : 47 - +
[2] ROOM-TEMPERATURE DESORPTION OF HE-3 FROM METAL TRITIDES - TRITIUM CONCENTRATION EFFECT ON RAPID RELEASE OF HELIUM FROM TRITIDE
BEAVIS, LC
KASS, WJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 509 - 513
[3] BEAVIS LC, 1977, COMMUNICATION JUN
[4] DEPTH DISTRIBUTION OF IMPLANTED HELIUM AND OTHER LOW-Z ELEMENTS IN METAL-FILMS USING PROTON BACKSCATTERING
BLEWER, RS
[J]. APPLIED PHYSICS LETTERS, 1973, 23 (11) : 593 - 595
[5] DIMENSIONAL EXPANSION AND SURFACE MICROSTRUCTURE IN HELIUM-IMPLANTED ERBIUM AND ERBIUM-HYDRIDE FILMS
BLEWER, RS
MAURIN, JK
[J]. JOURNAL OF NUCLEAR MATERIALS, 1972, 44 (03) : 260 - &
[6] BLEWER RS, 1976, J NUCL MATER, V63, P337, DOI 10.1016/0022-3115(76)90348-2
[7] BLEWER RS, 1976, ADV CHEM SERIES, P262
[8] BLEWER RS, 1974, APPLICATIONS ION BEA, P557
[9] 3-PARAMETER FORMULA FOR ELECTRONIC STOPPING CROSS-SECTION AT NONRELATIVISTIC VELOCITIES
BRICE, DK
[J]. PHYSICAL REVIEW A, 1972, 6 (05): : 1791 - &
[10] HELIUM DETRAPPING AND RELEASE FROM METAL TRITIDES
CAMP, WJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 514 - 517