Modelling of inductively coupled discharges with internal and external coils

被引：53

作者：

Lister, G. G. ^{[1
]}

Cox, M. ^{[2
]}

机构：

[1] Cent Res Labs, EMI, THORN, Hayes UB43 1HH, Middx, England

[2] Culham Lab, AEA Technol, Abingdon OX14 3DB, Oxon, England

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 1992年 / 1卷 / 01期

关键词：

D O I：

10.1088/0963-0252/1/1/008

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A one-dimensional model is developed for studying the electromagnetic properties of inductively coupled discharges with internal coils. Two different plasma boundary conditions are considered - a perfectly conducting cylinder and a freely radiating plasma-air boundary. Current and power densities. plasma impedances and radiated power are computed. Results are compared with those of previous workers for discharges with external coils.

引用

页码：67 / 73

页数：7

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