VERY HARD W-C COATINGS ON STAINLESS-STEEL BY RF REACTIVE MAGNETRON SPUTTERING

被引：30

作者：

SRIVASTAVA, PK ^{[1
]}

VANKAR, VD ^{[1
]}

CHOPRA, KL ^{[1
]}

机构：

[1] INDIAN INST TECHNOL,CTR MAT SCI & TECHNOL,NEW DELHI 110016,INDIA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573685

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：2819 / 2826

页数：8

相关论文

共 39 条

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