DETERMINATION OF OXYGEN AND NITROGEN IN TANTALUM THIN-FILMS BY NUCLEAR TECHNIQUES AND AUGER-SPECTROSCOPY

被引：2

作者：

DELLAMEA, G

BAERI, P

CAMPISANO, SU

COCITO, M

机构：

[1] CESLT,SEZ COMPONENTI & MATERIALI,TORINO,ITALY

[2] UNIV CATANIA,IST STRUTTURA MATERIA,I-95125 CATANIA,ITALY

来源：

关键词：

D O I：

10.1016/0040-6090(78)90206-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L5 / L8

页数：4

共 7 条

AMSEL, G ;

NADAI, JP ;

DARTEMAR.E ;

DAVID, D ;

GIRARD, E ;

MOULIN, J .

NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04) :481-&

[2]

CHU WK, 1977, ION BEAM HDB MATERIA

[3]

LANGLEY RA, 1975, ION BEAM SURFACE LAY, P337

[4]

MAISSEL LI, 1970, HDB THIN FILM TECHNO, P18

[5] SELECTED AREA AND IN-DEPTH AUGER ANALYSIS OF THIN-FILMS [J].

MORABITO, JM .

TUROS, A ;

WIELUNSKI, L ;

BARCZ, A .

NUCLEAR INSTRUMENTS & METHODS, 1973, 111 (03) :605-610

[7]

WATERHOUSE N, 1972, 22ND P IEEE EL COMP, P58