ELEMENTAL ANALYSIS OF THICK AMORPHOUS SPECIMENS BY EELS

被引:9
作者
CHENG, SC
EGERTON, RF
机构
[1] Physics Department, University of Alberta, Edmonton
关键词
TEM; EELS; ANALYTICAL ELECTRON MICROSCOPY; ELEMENTAL ANALYSIS;
D O I
10.1016/0968-4328(93)90050-B
中图分类号
TH742 [显微镜];
学科分类号
摘要
Changes in the relative intensity of ionization edges with increasing specimen thickness are shown to arise from the influence of elastic scattering on the energy-loss spectrum. In the case of an amorphous specimen, the resulting error in measured elemental composition can be minimised by using a medium-sized (e.g. 20 mrad) collection aperture, or may be corrected for by applying the Lenz model of elastic scattering.
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页码:251 / 256
页数:6
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