FOCUSED ION-BEAM SECONDARY ION MASS-SPECTROMETRY - ION IMAGES AND ENDPOINT DETECTION

[1] Ben Naim A., 1987, SECONDARY ION MASS S, P260

[2] SECONDARY ION YIELDS NEAR 1 FOR SOME CHEMICAL COMPOUNDS [J]. PHYSICS LETTERS A, 1972, A-40 (02) : 169 - +

[3] A DETERMINATION OF THE IONIZATION PROBABILITY FOR ALUMINUM SECONDARY ION EMISSION [J]. SURFACE SCIENCE, 1984, 138 (2-3) : 432 - 448

[4] Harriott L. R., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V773, P190, DOI 10.1117/12.940370

[5] HARRIOTT LR, 1986, J VAC SCI TECHNOL B, V4, P187

[6] HARRIOTT LR, 1988, MATER RES SOC S P, V101, P483

[7] KINGHAM DR, 1985, MATER RES S PROC, V48, P319

[8] SCANNING ION MICROSCOPY - ELEMENTAL MAPS AT HIGH LATERAL RESOLUTION [J]. APPLIED SURFACE SCIENCE, 1986, 26 (03) : 249 - 264

[9] Meingaills J., 1987, J VAC SCI TECHNOL B, V5, P469

[10] PARKER NW, 1986, P SPIE INT SOC OPT E, V632, P126

[1] Ben Naim A., 1987, SECONDARY ION MASS S, P260

[2] SECONDARY ION YIELDS NEAR 1 FOR SOME CHEMICAL COMPOUNDS [J]. PHYSICS LETTERS A, 1972, A-40 (02) : 169 - +

[3] A DETERMINATION OF THE IONIZATION PROBABILITY FOR ALUMINUM SECONDARY ION EMISSION [J]. SURFACE SCIENCE, 1984, 138 (2-3) : 432 - 448

[4] Harriott L. R., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V773, P190, DOI 10.1117/12.940370

[5] HARRIOTT LR, 1986, J VAC SCI TECHNOL B, V4, P187

[6] HARRIOTT LR, 1988, MATER RES SOC S P, V101, P483

[7] KINGHAM DR, 1985, MATER RES S PROC, V48, P319

[8] SCANNING ION MICROSCOPY - ELEMENTAL MAPS AT HIGH LATERAL RESOLUTION [J]. APPLIED SURFACE SCIENCE, 1986, 26 (03) : 249 - 264

[9] Meingaills J., 1987, J VAC SCI TECHNOL B, V5, P469

[10] PARKER NW, 1986, P SPIE INT SOC OPT E, V632, P126