PARTIAL DISLOCATIONS, COLUMNAR GROWTH, CLUSTERING, AND PINHOLE FORMATION IN ULTRATHIN FILM SEMICONDUCTOR HETEROSTRUCTURES

被引：38

作者：

PHILLIPS, JC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期

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D O I：

10.1116/1.571123

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：545 / 550

页数：6

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