ETCHING GE WITH MIXTURES OF HF-H2O2-H2O

[1] HILLOCKS, PITS, AND ETCH RATE IN GERMANIUM CRYSTALS [J]. JOURNAL OF APPLIED PHYSICS, 1957, 28 (11) : 1236 - 1241

[2] A STUDY OF THE ETCHING RATE OF SINGLE-CRYSTAL GERMANIUM [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1955, 102 (10) : 586 - 593

[3] SURFACE STUDIES ON SINGLE-CRYSTAL GERMANIUM [J]. JOURNAL OF APPLIED PHYSICS, 1957, 28 (11) : 1262 - 1269

[4] ORIENTATION-DEPENDENT DISSOLUTION OF GERMANIUM [J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (11) : 1996 - 1999

[5] GEIST D, 1957, Z ANGEW PHYSIK NUKL, V9, P526

[6] GOLDSTEIN B, 1957, RCA REV, V18, P213

[7] THE ORIENTATION DEPENDENCE OF ETCHING EFFECTS ON GERMANIUM CRYSTALS [J]. ACTA METALLURGICA, 1959, 7 (04): : 283 - 290

[8] SHAPES OF ETCH HILLOCKS AND PITS AND THEIR CORRELATION WITH MEASURED ETCH RATES [J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (01) : 109 - 111

[9] MICHELITSCH M, 1960, Z ANGEW PHYS, V12, P180

[10] RIESSLER W, 1960, Z ANGEW PHYS, V12, P433

[1] HILLOCKS, PITS, AND ETCH RATE IN GERMANIUM CRYSTALS [J]. JOURNAL OF APPLIED PHYSICS, 1957, 28 (11) : 1236 - 1241

[2] A STUDY OF THE ETCHING RATE OF SINGLE-CRYSTAL GERMANIUM [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1955, 102 (10) : 586 - 593

[3] SURFACE STUDIES ON SINGLE-CRYSTAL GERMANIUM [J]. JOURNAL OF APPLIED PHYSICS, 1957, 28 (11) : 1262 - 1269

[4] ORIENTATION-DEPENDENT DISSOLUTION OF GERMANIUM [J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (11) : 1996 - 1999

[5] GEIST D, 1957, Z ANGEW PHYSIK NUKL, V9, P526

[6] GOLDSTEIN B, 1957, RCA REV, V18, P213

[7] THE ORIENTATION DEPENDENCE OF ETCHING EFFECTS ON GERMANIUM CRYSTALS [J]. ACTA METALLURGICA, 1959, 7 (04): : 283 - 290

[8] SHAPES OF ETCH HILLOCKS AND PITS AND THEIR CORRELATION WITH MEASURED ETCH RATES [J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (01) : 109 - 111

[9] MICHELITSCH M, 1960, Z ANGEW PHYS, V12, P180

[10] RIESSLER W, 1960, Z ANGEW PHYS, V12, P433