ION-IMPLANTATION IN BETA-SIC - EFFECT OF CHANNELING DIRECTION AND CRITICAL ENERGY FOR AMORPHIZATION

[1] LOCATION OF SHOULDERS IN CHANNELING PHENOMENA [J]. PHYSICAL REVIEW, 1968, 166 (02): : 219 - &

[2] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02): : 73 - 94

[3] CARTER CH, 1985, MICROSCOPIC IDENTIFI, P485

[4] CHU WK, 1978, BACKSCATTERING SPECT, P116

[5] CRYSTALLINE TO AMORPHOUS TRANSFORMATION IN ION-IMPLANTED SILICON - COMPOSITE MODEL [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (03) : 1119 - 1127

[6] Edmond J. A., 1986, Beam-Solid Interactions and Phase Transformations, P395

[7] Edmond J. A., 1987, Interfaces, Superlattices, and Thin Films Symposium, P193

[8] ELECTRICAL-PROPERTIES OF ION-IMPLANTED P-N-JUNCTION DIODES IN BETA-SIC [J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (03) : 922 - 929

[9] FELDMAN LC, 1982, MATERIALS ANAL ION C

[10] GEMMELL DS, 1974, REV MOD PHYS, V46, P217

[1] LOCATION OF SHOULDERS IN CHANNELING PHENOMENA [J]. PHYSICAL REVIEW, 1968, 166 (02): : 219 - &

[2] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02): : 73 - 94

[3] CARTER CH, 1985, MICROSCOPIC IDENTIFI, P485

[4] CHU WK, 1978, BACKSCATTERING SPECT, P116

[5] CRYSTALLINE TO AMORPHOUS TRANSFORMATION IN ION-IMPLANTED SILICON - COMPOSITE MODEL [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (03) : 1119 - 1127

[6] Edmond J. A., 1986, Beam-Solid Interactions and Phase Transformations, P395

[7] Edmond J. A., 1987, Interfaces, Superlattices, and Thin Films Symposium, P193

[8] ELECTRICAL-PROPERTIES OF ION-IMPLANTED P-N-JUNCTION DIODES IN BETA-SIC [J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (03) : 922 - 929

[9] FELDMAN LC, 1982, MATERIALS ANAL ION C

[10] GEMMELL DS, 1974, REV MOD PHYS, V46, P217