VACUUM-ARC DISCHARGES USED TO DEPOSIT HARD WEAR-RESISTANT COATINGS ONTO TOOLS

被引：4

作者：

GABRIEL, HM

机构：

[1] PVT Plasma und Vakuum Technik GmbH, RobertKoch-Strasse 14, D-64331, Weiterstadt

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1993年 / 21卷 / 05期

关键词：

D O I：

10.1109/27.249618

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The ''arc-ion-plating process'' used to deposit hard wear resistant coatings onto tools is described in detail, such as: the essence of the arc deposition technology, the microdroplets and potential ways of their elimination, the arc evaporation sources and vacuum coating systems, and the benefit of hard coatings for cutting tools.

引用

页码：416 / 418

页数：3