CHEMICAL-REACTIONS OF OXIDE LAYERS ON GAAS

被引：14

作者：

LANGER, DW ^{[1
]}

SCHUERMEYER, FL ^{[1
]}

JOHNSON, RL ^{[1
]}

SINGH, HP ^{[1
]}

LITTON, CW ^{[1
]}

HARTNAGEL, HL ^{[1
]}

机构：

[1] TH DARMSTADT,INST HOCHFREQUENZTECH,D-6100 DARMSTADT,FED REP GER

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 05期

关键词：

D O I：

10.1116/1.570648

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：964 / 966

页数：3

共 8 条

[1]

BREEZE PA, 1978 SPRING M EL SOC, V78, P336

[2]

BREEZE PA, UNPUBLISHED

[3]

HANNAH SJ, 1979, THESIS

[4]

HANNAH SJ, 1979, 5TH EUR MICR SEM DEV

[5] ANODIC-OXIDATION OF GAAS IN MIXED SOLUTIONS OF GLYCOL AND WATER [J].

HASEGAWA, H ;

HARTNAGEL, HL .

[6]

KUBASCHEWSKI O, 1958, METALLURGICAL THERMO, V1

[7]

SCHUERMEYER F, UNPUBLISHED

SPICER, WE ;

CHYE, PW ;

SKEATH, PR ;

SU, CY ;

LINDAU, I .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05) :1422-1433