INTERNAL-STRESS AND ADHERENCE OF TITANIUM NITRIDE COATINGS

[1] HARD CHROME AND MOLYBDENUM COATINGS PRODUCED BY PHYSICAL VAPOR-DEPOSITION [J]. THIN SOLID FILMS, 1985, 126 (1-2) : 61 - 67

[2] BARRETT CS, 1966, STRUCTURE METALS, P465

[3] THE STRESS IN ION-PLATED HFN AND TIN COATINGS [J]. THIN SOLID FILMS, 1985, 123 (03) : 223 - 234

[4] CHOLLET L, 1985, J MATER ENERG SYST, V6, P293

[5] Coad J. P., 1979, P INT C ION PLATING, P186

[6] ORIGINS OF STRESS IN THIN NICKEL FILMS [J]. THIN SOLID FILMS, 1972, 12 (01) : 71 - &

[7] DUGDALE RA, 1977, P INT C ION PLATING, P177

[8] GUROV SV, 1982, IAN SSSR NEORG MATER, V18, P1733

[9] INFLUENCE OF THE NITROGEN PARTIAL-PRESSURE ON THE PROPERTIES OF DC-SPUTTERED TITANIUM AND TITANIUM NITRIDE FILMS [J]. THIN SOLID FILMS, 1984, 111 (04) : 339 - 349

[10] INFLUENCE OF CONDENSATION SURFACE-TEMPERATURE ON MICROSTRUCTURE AND INTRINSIC STRESS IN EVAPORATED CHROMIUM FILMS [J]. THIN SOLID FILMS, 1977, 45 (03) : 463 - 471

[1] HARD CHROME AND MOLYBDENUM COATINGS PRODUCED BY PHYSICAL VAPOR-DEPOSITION [J]. THIN SOLID FILMS, 1985, 126 (1-2) : 61 - 67

[2] BARRETT CS, 1966, STRUCTURE METALS, P465

[3] THE STRESS IN ION-PLATED HFN AND TIN COATINGS [J]. THIN SOLID FILMS, 1985, 123 (03) : 223 - 234

[4] CHOLLET L, 1985, J MATER ENERG SYST, V6, P293

[5] Coad J. P., 1979, P INT C ION PLATING, P186

[6] ORIGINS OF STRESS IN THIN NICKEL FILMS [J]. THIN SOLID FILMS, 1972, 12 (01) : 71 - &

[7] DUGDALE RA, 1977, P INT C ION PLATING, P177

[8] GUROV SV, 1982, IAN SSSR NEORG MATER, V18, P1733

[9] INFLUENCE OF THE NITROGEN PARTIAL-PRESSURE ON THE PROPERTIES OF DC-SPUTTERED TITANIUM AND TITANIUM NITRIDE FILMS [J]. THIN SOLID FILMS, 1984, 111 (04) : 339 - 349

[10] INFLUENCE OF CONDENSATION SURFACE-TEMPERATURE ON MICROSTRUCTURE AND INTRINSIC STRESS IN EVAPORATED CHROMIUM FILMS [J]. THIN SOLID FILMS, 1977, 45 (03) : 463 - 471