INFLUENCE OF LASER FLUENCE ON STRUCTURAL AND FERROELECTRIC PROPERTIES OF LEAD-ZIRCONATE-TITANATE THIN-FILMS PREPARED BY LASER ABLATION

被引：20

作者：

KIDOH, H ^{[1
]}

OGAWA, T ^{[1
]}

YASHIMA, H ^{[1
]}

MORIMOTO, A ^{[1
]}

SHIMIZU, T ^{[1
]}

机构：

[1] KANAZAWA UNIV,FAC TECHNOL,DEPT ELECTR,KANAZAWA,ISHIKAWA 920,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 9B期

关键词：

LASER ABLATION; PZT THIN FILM; LASER FLUENCE; NO DEVIATION OF COMPOSITION; HIGH DEPOSITION RATE; REMANENT POLARIZATION; COERCIVE FIELD;

D O I：

10.1143/JJAP.30.2167

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ferroelectric lead-zirconate-titanate (PZT) thin films were deposited by excimer laser ablation on (100) MgO substrates with and without an electrode. The film composition was approximately the same as that of the target over a laser fluence range of 2.6 and 10 J/cm2.shot. Increase in the laser fluence enhances the film deposition rate and the crystallite size. In representative experiments, the remanent polarization and coercive field of the film prepared at a laser fluence of 9.2 J/cm2.shot were 28-mu-C/cm2 and 72 kV/cm, respectively.

引用

页码：2167 / 2169

页数：3

共 9 条

[1] PULSED LASER DEPOSITION AND FERROELECTRIC CHARACTERIZATION OF BISMUTH TITANATE FILMS [J].

BUHAY, H ;

SINHAROY, S ;

KASNER, WH ;

FRANCOMBE, MH ;

LAMPE, DR ;

STEPKE, E .

APPLIED PHYSICS LETTERS, 1991, 58 (14) :1470-1472

[2]

CHIANG CK, 1990, MATER RES SOC SYMP P, V200, P133, DOI 10.1557/PROC-200-133

[3] EPITAXIAL-GROWTH OF THIN-FILMS OF BATIO3 USING EXCIMER LASER ABLATION [J].

DAVIS, GM ;

GOWER, MC .

APPLIED PHYSICS LETTERS, 1989, 55 (02) :112-114

[4] FERROELECTRIC PROPERTIES OF LEAD-ZIRCONATE-TITANATE FILMS PREPARED BY LASER ABLATION [J].

KIDOH, H ;

OGAWA, T ;

MORIMOTO, A ;

SHIMIZU, T .

APPLIED PHYSICS LETTERS, 1991, 58 (25) :2910-2912

[5]

MORIMOTO A, 1990, 1990 MAT RES SOC S P, V191, P31

[6]

OSTUBO S, 1988, JPN J APPL PHYS, V27, pL1999

[7]

OSTUBO S, 1989, JPN J APPL PHYS, V29, pL133

[8] CRYSTALLIZATION INDUCED BY LASER IRRADIATION IN BA-Y-CU-O SUPERCONDUCTING FILMS PREPARED BY LASER ABLATION [J].

OTSUBO, S ;

MINAMIKAWA, T ;

YONEZAWA, Y ;

MAEDA, T ;

MORIMOTO, A ;

SHIMIZU, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (11) :2211-2218

[9]

SAENGER KL, 1990, MATER RES SOC SYMP P, V200, P115, DOI 10.1557/PROC-200-115

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