NOBLE-GAS ION SPUTTERING YIELD OF GOLD AND COPPER - DEPENDENCE ON THE ENERGY AND ANGLE OF INCIDENCE OF THE PROJECTILES

被引：35

作者：

OLIVAFLORIO, A

BARAGIOLA, RA

JAKAS, MM

ALONSO, EV

FERRON, J

机构：

[1] CTR ATOM BARILOCHE, RA-8400 SAN CARLOS DE BARILOCHE, RIO NEGRO, ARGENTINA

[2] INST BALSEIRO, RA-8400 SAN CARLOS DE BARILOCHE, RIO NEGRO, ARGENTINA

来源：

PHYSICAL REVIEW B | 1987年 / 35卷 / 05期

关键词：

D O I：

10.1103/PhysRevB.35.2198

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：2198 / 2204

页数：7

共 31 条

[1] COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS [J].

ALMEN, O ;

BRUCE, G .

NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02) :257-278

[2] HEAVY-ION SPUTTERING YIELDS OF GOLD - FURTHER EVIDENCE OF NONLINEAR EFFECTS [J].

ANDERSEN, HH ;

BAY, HL .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) :2416-2422

[3] ENERGY-DEPENDENCE OF GOLD SELF-SPUTTERING [J].

BAY, HL ;

ANDERSEN, HH ;

HOFER, WO ;

NIELSEN, O .

NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F) :301-305

[4] SPUTTERING YIELDS FOR LIGHT-IONS AS A FUNCTION OF ANGLE OF INCIDENCE [J].

BAY, HL ;

BOHDANSKY, J .

APPLIED PHYSICS, 1979, 19 (04) :421-426

[5] ANGULAR-DISTRIBUTION AND DIFFERENTIAL SPUTTERING YIELDS FOR LOW-ENERGY LIGHT-ION IRRADIATION OF POLYCRYSTALLINE NICKEL AND TUNGSTEN [J].

BAY, HL ;

BOHDANSKY, J ;

HOFER, WO ;

ROTH, J .

APPLIED PHYSICS, 1980, 21 (04) :327-333

[6]

Behrisch R., 1981, SPUTTERING PARTICLE, V1

[7] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J].

BIERSACK, JP ;

ECKSTEIN, W .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :73-94

[8] SPUTTERING AT ACUTE INCIDENCE [J].

CHENEY, KB ;

PITKIN, ET .

JOURNAL OF APPLIED PHYSICS, 1965, 36 (11) :3542-&

[9] DEPENDENCE OF SPUTTERING COEFFICIENT ON ION DOSE [J].

COLLIGON, JS ;

PATEL, MH .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 32 (3-4) :193-197

[10] DIE ZERSTAUBUNG VON KUPFER DURCH NE+-, AR+-, KR+- UND XE+-IONEN IM ENERGIEBEREICH VON 75 KEV BIS 1 MEV [J].

DUPP, G ;

SCHARMANN, A .

ZEITSCHRIFT FUR PHYSIK, 1966, 192 (03) :284-+

← 1 2 3 4 →